Orthogonal motion microscope stage
US5684628A · kind A · utility
9Cited by
2References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 15, 1995 |
| Grant date | Nov 4, 1997 |
| Priority date | — |
| Expiry date | Feb 15, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/26
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An orthogonal motion stage provides Z axis motion, along an optical axis independently of translational motion in an orthogonal, X-Y axis reference plane. Conversely, motion in the X-Y reference plane does not induce unwanted motion in the Z axis. Straight line mechanisms interconnect the Z axis carrier to a base plate. Flexible connections are used in the straight line mechanisms to ensure accurate orthogonal motion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.