Atomic force microscope using cantilever attached to optical microscope
US5689063A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 4, 1995 |
| Grant date | Nov 18, 1997 |
| Priority date | — |
| Expiry date | Dec 4, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/869
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Without necessitating complicated operations, an image of a low to medium magnification and an image of a high magnification are efficiently observed by an optical microscope and by an atomic force microscope, respectively. In the atomic force microscope, an atomic force microscope probe, whose size has been reduced since a device for detecting interatomic force is provided by a piezoelectric film, piezoresistance, or the like, is disposed between an objective lens of the optical microscope and a sample to be observed or at a position of the objective lens when the objective lens and the probe are constructed so as to be interchangeable, thereby enabling the optical microscope to confirm a scanning position of the atomic force microscope.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.