Thermosetting anti-reflective coatings compositions
US5693691A · kind A · utility
93Cited by
7References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 21, 1995 |
| Grant date | Dec 2, 1997 |
| Priority date | — |
| Expiry date | Aug 21, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S522/904
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
A thermosetting anti-reflective coating and method for making and using the same is disclosed for a broad range of exposure wavelengths, said coating containing an active curing catalyst, ether or ester linkages derived from epoxy functionality greater than 3.0, a dye-grafted hydroxyl-functional oligomer, and an alkylated aminoplast crosslinking agent, all present in a low-to-medium alcohol-containing solvent.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.