Insulated-gate transistor having narrow-bandgap-source
US5698869A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 13, 1995 |
| Grant date | Dec 16, 1997 |
| Priority date | — |
| Expiry date | Sep 13, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/675
Abstract
A structure of a semiconductor device and a method of manufacturing the same is provided wherein a leakage current can be reduced while improving a drain breakdown voltage of an Insulated-Gate transistor such as a MOSFET, MOSSIT and a MISFET, and a holding characteristic of a memory cell such as a DRAM using these transistors as switching transistors can be improved, and further a reliability of a gate oxide film in a transfer gate can be improved. More particularly, a narrow band gap semiconductor region such as Si.sub.x Ge.sub.1-x, Si.sub.x Sn.sub.1-x, PbS is formed in an interior of a source region or a drain region in the SOI.IG-device. By selecting location and/or mole fraction of the narrow band gap semiconductor region in a SOI film, or selecting a kind of impurity element to compensate the crystal lattice mismatching due to the narrow-bandgap semiconductor region, the generation of crystal defects can be suppressed. Further the structure that the influences of the crystal defects to the transistor or memory characteristics such as the leakage current can be suppressed, even if the crystal defects are generated, are also proposed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.