Measuring element for a flow sensor

US5703287A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Christoph Treutler · Wannweil, DE
• Rolf Benz · Gachnang, CH
• Horst Muenzel · Reutlingen, DE
• Steffen Schmidt · Dresden, DE
• Eckart Reihlen · Reutlingen, DE
• Andreas Lock · Reutlingen, DE

Key dates

• Filing date: Mar 26, 1996
• Grant date: Dec 30, 1997
• Expiry date: Mar 26, 2016

Classification

• Technology area (CPC G): Physics
• CPC primary: G01F1/692
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In a measuring element for a flow sensor and a method for manufacturing the measuring element, a heater, a temperature sensor, and a printed circuit trace are patterned out of a platinum layer. Furthermore, an interconnection region is used for contacting the measuring chip with bonding wires. An additional metal layer is provided for the interconnection region.