Mass flow sensor

US5705745A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Christoph Treutler · Wannweil, DE
• Detlef Gruen · Reutlingen, DE
• Horst Muenzel · Reutlingen, DE
• Helmut Baumann · Gomaringen, DE
• Steffen Schmidt · Dresden, DE
• Andreas Lock · Reutlingen, DE

Key dates

• Filing date: Jul 29, 1996
• Grant date: Jan 6, 1998
• Expiry date: Jul 29, 2016

Classification

• Technology area (CPC G): Physics
• CPC primary: G01F1/6845
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In a mass flow sensor having a frame of monocrystalline silicon and a membrane fixed therein, a heating element and, if indicated, temperature-measuring elements are provided on the membrane. A heat-conducting element, which extends from the membrane across the frame, is provided in the edge area of the membrane. The heating element, the heat-conducting element and, if indicated, temperature-measuring elements are patterned out of a single metal layer.