RF plasma power supply combining technique for increased stability
US5712592A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 6, 1995 |
| Grant date | Jan 27, 1998 |
| Priority date | — |
| Expiry date | Mar 6, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H11/36
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An RF power amplifier including a splitter, two branch circuits, and a combiner. The splitter has an input line receiving an RF signal, a first output line carrying a first output signal derived from the RF signal, and a second output line carrying a second output signal derived from the RF signal. A first branch circuit receives the first output signal and generates therefrom a first derived signal. A second branch circuit receives the second output signal and generates therefrom a second derived signal therefrom. The first branch circuit includes a first power amplifier and a phase shifting element. The second branch circuit includes a second power amplifier. The combiner, which has a first input receiving the first derived signal and a second input receiving the second derived signal, combines the first and second derived signals to produce a power output signal therefrom. The phase shifting element is connected between the output line of the first power amplifier and the first input of the combiner and produces a phase shift in a signal passing from the first power amplifier to the combiner relative to a signal passing from the second power amplifier to the combiner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.