Illumination optical apparatus
US5713660A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 4, 1994 |
| Grant date | Feb 3, 1998 |
| Priority date | — |
| Expiry date | Nov 4, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B19/0047
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An illumination optical apparatus according to the present invention comprises a light source, a collector mirror having an ellipsoidal surface of revolution for reflecting and collecting light from the light source, a collimator lens for converting the light collected by the collector mirror into nearly parallel beams, an optical integrator for producing a plurality of light source images from the beams outgoing from the collimator lens, and a condenser lens for condensing light from the plurality of light source images to illuminate a body to be illuminated in a superimposed manner. Wherein the collimator lens is arranged to satisfy the following condition, R.sub.max <f.sub.col .multidot.sin u.sub.max ; where f.sub.col is a focal length of the condenser lens, u.sub.max a maximum angle of incidence of the light incident into the collimator lens, and R.sub.max a maximum beam radius of the nearly parallel beams collimated by the collimator lens.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.