Apparatus for generating large distributed plasmas by means of plasma-guided microwave power
US5714009A · kind A · utility
17Cited by
4References
38Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 11, 1995 |
| Grant date | Feb 3, 1998 |
| Priority date | — |
| Expiry date | Jan 11, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32192
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus and method for generating a plasma within a volume containing a mixture of gaseous species. To generate the plasma, at least one large area applicator, which is a part of this invention, is employed. At least one microwave generator introduces microwave power into the applicator by means of suitable waveguides and couplers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.