Scanning stylus atomic force microscope with cantilever tracking and optical access

US5714682A · kind A · utility

Assignees

• Digital Instruments, Inc. · US
• The Regents of the University of California · US

Inventors

• Craig Prater · Lompoc, US
• James Massie · Lompoc, US
• David Grigg · Midland School, US
• Virgil B. Elings · Lompoc, US
• Paul K. Hansma · Isla Vista, US
• Barney Drake · Truckee, US

Key dates

• Filing date: Jul 11, 1996
• Grant date: Feb 3, 1998
• Expiry date: Jul 11, 2016

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S977/87
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A scanned-stylus atomic force microscope (AFM) employing the optical lever technique, and method of operating the same. The AFM of the invention includes a light source and a scanned optical assembly which quides light emitted from the light source onto a point on a cantilever during scanning thereof. A moving light beam is thus created which will automatically track the movement of the cantilever during scanning. The invention also allows the light beam to be used to measure, calibrate or correct the motion of the scanning mechanism, and further allows viewing of the sample and cantilever using an optical microscope.