Scanning probe microscope having a single viewing device for on-axis and oblique angle views
US5714756A · kind A · utility
89Cited by
6References
19Claims
0Family size
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Inventors
Key dates
| Filing date | Sep 13, 1996 |
| Grant date | Feb 3, 1998 |
| Priority date | — |
| Expiry date | Sep 13, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/874
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.