Shielded heat sensor for measuring temperature
US5716133A · kind A · utility
479Cited by
11References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 17, 1995 |
| Grant date | Feb 10, 1998 |
| Priority date | — |
| Expiry date | Jan 17, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor for measuring the temperature of a workpiece including a substrate, wafer, shield or other element in a semiconductor processing system. In the illustrated embodiment, the sensor has a heat shield to reflect away from the heat sensing element, heat from unwanted sources such as susceptors and heating cartridges which can adversely affect the accuracy of the measurement. In addition, the heat shield preferably has a small thermal mass for improved responsivity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.