Applied Komatsu Technology, Inc.
57Patents
0Active
57Granted
40Portfolio score
Filing activity: Jul 11, 1994 → Nov 1, 2001
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6182603A | Surface-treated shower head for use in a substrate processing chamber | Emerging Cross-Sectional Technologies | 563 | Expired |
| US5716133A | Shielded heat sensor for measuring temperature | Physics | 479 | Expired |
| US6235634A | Modular substrate processing system | Electricity | 215 | Expired |
| US5788778A | Deposition chamber cleaning technique using a high power remote excitation source | Emerging Cross-Sectional Technologies | 138 | Expired |
| US6206176A | Substrate transfer shuttle having a magnetic drive | Emerging Cross-Sectional Technologies | 115 | Expired |
| US6213704A | Method and apparatus for substrate transfer and processing | Emerging Cross-Sectional Technologies | 95 | Expired |
| US6024044A | Dual frequency excitation of plasma for film deposition | Chemistry; Metallurgy | 88 | Expired |
| US5855744A | Non-planar magnet tracking during magnetron sputtering | Electricity | 65 | Expired |
| US6286230A | Method of controlling gas flow in a substrate processing system | Emerging Cross-Sectional Technologies | 63 | Expired |
| US5518593A | Shield configuration for vacuum chamber | Electricity | 60 | Expired |
| US6055927A | Apparatus and method for white powder reduction in silicon nitride deposition using remote plasma source cleaning technology | Chemistry; Metallurgy | 57 | Expired |
| US6086362A | Multi-function chamber for a substrate processing system | Electricity | 56 | Expired |
| US5844205A | Heated substrate support structure | Chemistry; Metallurgy | 54 | Expired |
| US6176668A | In-situ substrate transfer shuttle | Emerging Cross-Sectional Technologies | 53 | Expired |
| US6079693A | Isolation valves | Mechanical Engineering; Lighting; Heating | 45 | Expired |
| US6534007B1 | Method and apparatus for detecting the endpoint of a chamber cleaning | Emerging Cross-Sectional Technologies | 45 | Expired |
| US6016611A | Gas flow control in a substrate processing system | Emerging Cross-Sectional Technologies | 44 | Expired |
| US6435868B2 | Multi-function chamber for a substrate processing system | Electricity | 42 | Expired |
| US6471459B2 | Substrate transfer shuttle having a magnetic drive | Emerging Cross-Sectional Technologies | 42 | Expired |
| US6199259A | Autoclave bonding of sputtering target assembly | Emerging Cross-Sectional Technologies | 41 | Expired |
| US5895937A | Tapered dielectric etch in semiconductor devices | Emerging Cross-Sectional Technologies | 41 | Expired |
| US6215897A | Automated substrate processing system | Physics | 41 | Expired |
| US5895549A | Method and apparatus for etching film layers on large substrates | Emerging Cross-Sectional Technologies | 38 | Expired |
| US5607602A | High-rate dry-etch of indium and tin oxides by hydrogen and halogen radicals such as derived from HCl gas | Emerging Cross-Sectional Technologies | 37 | Expired |
| US6517303B1 | Substrate transfer shuttle | Emerging Cross-Sectional Technologies | 36 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.