Apparatus for coating substrates by cathode sputtering with a hollow target
US5716505A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Feb 19, 1997 |
| Grant date | Feb 10, 1998 |
| Priority date | — |
| Expiry date | Feb 19, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3402
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A pot-shaped hollow target (4) open toward the substrate (3) to be coated is surrounded by a dark-space shield (7) adjacent the lateral wall (5) of the target (4), and a cathode base body (11) is supported on an insulator (9) on the roof (10) of the vacuum chamber (2) and connected electrically to a power source (6). A hanger (15) reaches through a central opening (12) in the cathode base body (11) and through a central opening in the top (8) of the target (4) and is supported on the cathode base by an insulator (14), and holds a disk (16) shielding the top (8) of the target (4). A motor-driven turntable (18) forms the substrate holder (17), whose axis of rotation (19) is parallel to but offset laterally from the plane of symmetry (20) of the target by an amount (A).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.