Hybrid mirror structure for a visible emitting VCSEL
US5719892A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 23, 1996 |
| Grant date | Feb 17, 1998 |
| Priority date | — |
| Expiry date | Apr 23, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/18372
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A hybrid mirror structure for a visible emitting VCSEL including a first distributed Bragg reflector disposed on a substrate and including first pairs of alternating layers including an oxidized aluminum material and second pairs of alternating layers. A first cladding region disposed on the first distributed Bragg reflector, an active region disposed on the first cladding region, and a second cladding region disposed on the active region, and a second distributed Bragg reflector disposed on the second cladding region. In the first distributed Bragg reflector, each pair of alternating layers includes a layer containing oxidized aluminum. Alternate layers contain AlAs which is oxidized to decrease the index of refraction to a range of approximately 1.3 to 1.7.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.