Articulated arm transfer device
US5720590A · kind A · utility
75Cited by
28References
24Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 3, 1995 |
| Grant date | Feb 24, 1998 |
| Priority date | — |
| Expiry date | May 3, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K5/128
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A concentric-shaft rotational drive system for an articulated arm transfer device adaptable for imparting movement to an assembly inside a vacuum chamber wherein rotary movement is imparted to rotors inside the vacuum chamber by means of magnetic fields produced by stators outside the vacuum chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.