Brooks Automation GmbH
479Patents
314Active
479Granted
56Portfolio score
Filing activity: May 18, 1987 → Oct 5, 2021 · 110 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6990430B2 | System and method for on-the-fly eccentricity recognition | Electricity | 520 | Expired |
| US7925378B2 | Process apparatus with on-the-fly workpiece centering | Electricity | 517 | Active |
| US6441350B1 | Temperature control system for a thermal reactor | Mechanical Engineering; Lighting; Heating | 477 | Expired |
| US6158941A | Substrate transport apparatus with double substrate holders | Emerging Cross-Sectional Technologies | 467 | Expired |
| US6587744B1 | Run-to-run controller for use in microelectronic fabrication | Emerging Cross-Sectional Technologies | 150 | Expired |
| US5539323A | Sensor for articles such as wafers on end effector | Physics | 128 | Expired |
| US6643563B2 | Trajectory planning and motion control strategies for a planar three-degree-of-freedom robotic arm | Emerging Cross-Sectional Technologies | 120 | Expired |
| US6062798A | Multi-level substrate processing apparatus | Emerging Cross-Sectional Technologies | 118 | Expired |
| US7988398B2 | Linear substrate transport apparatus | Emerging Cross-Sectional Technologies | 114 | Expired |
| US6944584B1 | System and method for control and simulation | Physics | 112 | Expired |
| US5882413A | Substrate processing apparatus having a substrate transport with a front end extension and an internal substrate buffer | Emerging Cross-Sectional Technologies | 110 | Expired |
| US7882394B2 | Intelligent condition-monitoring and fault diagnostic system for predictive maintenance | Physics | 108 | Active |
| US5899658A | Articulated arm transfer device | Electricity | 97 | Expired |
| US5180276A | Articulated arm transfer device | Emerging Cross-Sectional Technologies | 96 | Expired |
| US7575406B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 93 | Active |
| US6485250B2 | Substrate transport apparatus with multiple arms on a common axis of rotation | Emerging Cross-Sectional Technologies | 86 | Expired |
| US6059507A | Substrate processing apparatus with small batch load lock | Emerging Cross-Sectional Technologies | 85 | Expired |
| US8500388B2 | Semiconductor wafer handling and transport | Emerging Cross-Sectional Technologies | 81 | Active |
| US5588827A | Passive gas substrate thermal conditioning apparatus and method | Electricity | 75 | Expired |
| US5720590A | Articulated arm transfer device | Electricity | 75 | Expired |
| US6002840A | Substrate transport apparatus | Emerging Cross-Sectional Technologies | 73 | Expired |
| US7959395B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 71 | Expired |
| US6216138A | Computer interface system for automatically generating graphical representations of computer operations linked together according to functional relationships | Physics | 70 | Expired |
| US8403613B2 | Bypass thermal adjuster for vacuum semiconductor processing | Electricity | 68 | Active |
| US5613821A | Cluster tool batchloader of substrate carrier | Emerging Cross-Sectional Technologies | 67 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.