Membrane optical waveguide device and method of fabrication
US5721801A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 17, 1996 |
| Grant date | Feb 24, 1998 |
| Priority date | — |
| Expiry date | Dec 17, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/2068
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of manufacturing an optical waveguide device. The method involves removing a portion of an upper cladding layer 110 from above a waveguide 106 and depositing a temporary spacer layer 114 in place of the removed upper cladding 110. A metal membrane 116 is deposited and patterned over the temporary spacer layer 114 and the temporary spacer 114 is removed, leaving the metal membrane 116 suspended over the waveguide 106. When a voltage differential is applied between the metal membrane 116 and electrodes 108 formed on a lower cladding 102, the metal membrane 116 is collapsed against the waveguide 106, attenuating any light transmitted by the waveguide 106.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.