Atomic force microscope under high speed feedback control
US5723775A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 2, 1996 |
| Grant date | Mar 3, 1998 |
| Priority date | — |
| Expiry date | Jul 2, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/872
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An object of the invention is to enable high-speed feedback control by decreasing the mass of a cantilever including an axial driving actuator and eliminate drawbacks caused by the decrease in mass. In a so-called atomic force microscope for observing the surface shape of a sample using a signal corresponding to an interatomic force or the distance between a probe and the sample surface by bringing the probe of a cantilever to the vicinity of the sample surface held by a sample stage and performing two-dimensional scanning with the probe, a piezoelectric film sandwiched between a pair of electrodes is formed on the cantilever, and the piezoelectric film displaces the cantilever in a predetermined direction due to a d.sub.31 inverse piezoelectric effect upon application of a signal voltage to the electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.