Tuneable microelectromechanical system resonator
US5729075A · kind A · utility
204Cited by
14References
13Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 23, 1997 |
| Grant date | Mar 17, 1998 |
| Priority date | — |
| Expiry date | May 23, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01H11/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A resonant beam or cantilever is implemented in single crystal silicon or polysilicon. Adjacent the end of the cantilever is an electrode capable of receiving a variable voltage. The cantilever has a natural mechanical resonant frequency when vibrated, and the varying electrostatic field resulting from the variation of applied voltage to the electrode is used to alter the natural restoring force of the cantilever so that a chosen vibration frequency of the cantilever can be achieved. Such vibrating cantilever can be used as the bases for a voltage control oscillator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.