Pellicle for a mask or substrate
US5729325A · kind A · utility
10Cited by
2References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 29, 1997 |
| Grant date | Mar 17, 1998 |
| Priority date | — |
| Expiry date | Jan 29, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24132
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A pellicle for a mask or substrate including a frame having one end surface and another end surface and a membrane extended over the frame on the one end surface side. A channel is formed in the other end surface of the frame. The channel is filled with a layer of a tackifier capable of expanding upon heating and/or light irradiation such that the tackifier layer does not protrude outward beyond the other end surface of the frame in an unexpanded state, but protrudes outward beyond the other end surface of the frame when expanded. No liner is attached to the tackifier layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.