Inventor · Annaka City, JP

Meguru Kashida

45Patents
13h-index
38Co-inventors
81Inventor score

Filing activity: Apr 4, 1986 → Nov 8, 2011

Most-cited inventions

PatentTitleAreaCited byStatus
US7776473B2 Silicon-silicon oxide-lithium composite, making method, and non-aqueous electrolyte secondary cell negative electrode material Emerging Cross-Sectional Technologies 39 Active
US5723860A Frame-supported pellicle for photomask protection Emerging Cross-Sectional Technologies 30 Expired
US4849491A Curable organopolysiloxane composition Chemistry; Metallurgy 29 Expired
US5693382A Frame-supported pellicle for dustproof protection of photomask in photolithography Emerging Cross-Sectional Technologies 23 Expired
US4726964A Method for imparting releasability to a substrate surface Chemistry; Metallurgy 21 Expired
US5286567A Pellicle for photolithographic mask Emerging Cross-Sectional Technologies 21 Expired
US5209996A Membrane consisting of silicon carbide and silicon nitride, method for the preparation thereof and mask for X-ray lithography utilizing the same Emerging Cross-Sectional Technologies 21 Expired
US5139633A Film-forming on substrate by sputtering Electricity 20 Expired
US5378514A Frame-supported pellicle for photolithography Emerging Cross-Sectional Technologies 18 Expired
US6436586B1 Pellicle with a filter and method for production thereof Physics 17 Expired
US5691088A Pellicle for protection of photolithographic mask Emerging Cross-Sectional Technologies 16 Expired
US5616927A Frame-supported pellicle for dustproof protection of photomask Physics 14 Expired
US5470621A Frame-supported pellicle for dustproof protection of photomask Physics 14 Expired
US5370951A Frame-supported pellicle for protection of photolithographic mask Emerging Cross-Sectional Technologies 13 Expired
US5834143A Frame-supported dustproof pellicle for photolithographic photomask Physics 13 Expired
US5132366A Curable silicone composition Chemistry; Metallurgy 11 Expired
US5300348A Frame-supported pellicle for photolithography, comprising a fluorocarbon containing organopolysiloxane based adhesive Emerging Cross-Sectional Technologies 11 Expired
US5326649A X-ray transmitting membrane for mask in x-ray lithography and method for preparing the same Emerging Cross-Sectional Technologies 10 Expired
US5234609A X-ray permeable membrane for X-ray lithographic mask Chemistry; Metallurgy 10 Expired
US5729325A Pellicle for a mask or substrate Emerging Cross-Sectional Technologies 10 Expired
US5419972A Frame-supported pellicle for dustproof protection of photomask Emerging Cross-Sectional Technologies 10 Expired
US5199055A X-ray lithographic mask blank with reinforcement Physics 9 Expired
US5327808A Method for the preparation of a frame-supported pellicle for photolithography Emerging Cross-Sectional Technologies 8 Expired
US4983701A Silicone composition for rendering surfaces non-adherent Chemistry; Metallurgy 7 Expired
US6350549B1 Jig for producing pellicle and method for producing pellicle using the same Emerging Cross-Sectional Technologies 7 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.