Mass flow controller with vertical purifier
US5730181A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 2, 1996 |
| Grant date | Mar 24, 1998 |
| Priority date | — |
| Expiry date | Dec 2, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A mass flow controller and purifier has a canister arranged at right angles to a flow path through the mass flow controller. The canister holds a contaminant scavenging material which a gas stream contacts as it flows to remove a contaminant such as water. A purified process gas stream is fed through a bypass of a mass flow meter. A portion of the gas is supplied to a mass flow sensor which generates a signal indicative of a rate of mass flow. The mass flow signal is amplified and the amplified mass flow signal is linearized in a linearizer. The linearized mass flow signal is fed to a comparator which compares the linearized mass flow signal with an error signal and provides an output signal indicative of a mass rate of flow through the mass flow meter. A valve is connected to the mass flow meter and is controlled by the mass flow meter signal to meter the gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.