Transfer apparatus for and method of transferring substrate
US5730574A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 4, 1996 |
| Grant date | Mar 24, 1998 |
| Priority date | — |
| Expiry date | Oct 4, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/137
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A transfer apparatus is adapted for transferring a substrate between two processing sections and includes two storage cassettes and two transfer robots. A first storage cassette has an insertion opening inserted in a first direction and a withdrawal opening oriented in a second direction, where the first and second directions intersect. A second storage cassette has an insertion opening oriented in a third direction and a withdrawal opening oriented in a fourth direction which fourth direction intersects the third direction. A first transfer device transfers a substrate from one of the two processing sections to the first storage cassette through the insertion opening of the first storage cassette and then transfers a substrate from the second storage cassette to the one processing section via the withdrawal opening of the second storage cassette. A second transfer device transfers a substrate from the first storage cassette to the other processing section via the withdrawal opening of the first storage cassette and then transfers a substrate from the other processing section to the second storage cassette through the insertion opening of the second storage cassette.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.