Process and device for optically measuring a point on a sample with high local resolution
US5731588A · kind A · utility
Inventors
Key dates
| Filing date | Nov 21, 1996 |
| Grant date | Mar 24, 1998 |
| Priority date | — |
| Expiry date | Nov 21, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/16
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a device for the optical measurement of a point (7) on a sample (8) with high-local resolution, with a light source (1) to emit a beam (16) suitable for exciting an energy state in the sample (8), and a detector (9) to detect the emitted light. The lateral resolution of the device is improved in that there is a stimulation light beam (17) from the exciting light source (1) to generate stimulated emission at the point (7) on the sample (8) excited by the light beam (16), in which the exciting light beam (16) and the stimulation light beam (17) are arranged in such a way that their intensity distributions partly overlap in the focal region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.