Magnetic energy monitor for an ultrasonic wirebonder
US5732873A · kind A · utility
2Cited by
6References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 13, 1996 |
| Grant date | Mar 31, 1998 |
| Priority date | — |
| Expiry date | Jun 13, 2016 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K31/12
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An ultrasonic wirebonder has a horn and a transducer for vibrating the horn at a predetermined frequency. A magnet affixed to the horn generates a magnetic field. A coil coupled to the magnet has an output signal induced from the magnetic field moving relative to said coil. A filtering means filters the output signal from the coil to determine the reliably of the ultrasonic bond. An output device is used to monitor the output signal and determine whether the bond is reliable.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.