Cantilever with integrated deflection sensor
US5739425A · kind A · utility
16Cited by
14References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 19, 1996 |
| Grant date | Apr 14, 1998 |
| Priority date | — |
| Expiry date | Aug 19, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/873
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cantilever for scanning probe microscopy and other force or deflection measurements is described. The cantilever includes at least one one integrated strain sensing element within a constriction section (62) . The cantilever is improved over known cantilevers by reducing the longitudinal extension of the constriction, such that its contribution to the total deflection of the cantilever is reduced. The design of the cantilever is further improved by applying a beam (63) with an essentially triangular cross section in either a vertical or a horizontal plane or both.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.