Peter Vettiger
62Patents
21h-index
83Co-inventors
91Inventor score
Filing activity: Feb 16, 1977 → Apr 17, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5177031A | Method of passivating etched mirror facets of semiconductor laser diodes | Emerging Cross-Sectional Technologies | 152 | Expired |
| US6092422A | Mechanical signal producer based on micromechanical oscillators and intelligent acoustic detectors and systems based thereon | Physics | 125 | Expired |
| US5376587A | Method for making cooling structures for directly cooling an active layer of a semiconductor chip | Electricity | 93 | Expired |
| US5835477A | Mass-storage applications of local probe arrays | Emerging Cross-Sectional Technologies | 92 | Expired |
| US4803181A | Process for forming sub-micrometer patterns using silylation of resist side walls | Emerging Cross-Sectional Technologies | 88 | Expired |
| US5247597A | Optical fiber alignment | Physics | 74 | Expired |
| US7928565B2 | Semiconductor device with a high thermal dissipation efficiency | Electricity | 68 | Active |
| US6084849A | Shape memory alloy recording medium, storage devices based thereon, and method for using these storage devices | Emerging Cross-Sectional Technologies | 66 | Expired |
| US5171717A | Method for batch cleaving semiconductor wafers and coating cleaved facets | Emerging Cross-Sectional Technologies | 59 | Expired |
| US5319725A | Bilithic composite for optoelectronic integration | Electricity | 55 | Expired |
| US6079255A | Mechanically coupled alternatively usable cantilever structures for scanning a surface | Emerging Cross-Sectional Technologies | 49 | Expired |
| US5287001A | Cooling structures and package modules for semiconductors | Electricity | 49 | Expired |
| US6249747A | Investigation and/or manipulation device | Emerging Cross-Sectional Technologies | 47 | Expired |
| US5032219A | Method for improving the planarity of etched mirror facets | Electricity | 37 | Expired |
| US4732871A | Process for producing undercut dummy gate mask profiles for MESFETs | Electricity | 35 | Expired |
| US7071031B2 | Three-dimensional integrated CMOS-MEMS device and process for making the same | Electricity | 31 | Expired |
| US6835589B2 | Three-dimensional integrated CMOS-MEMS device and process for making the same | Electricity | 28 | Expired |
| US6647766B2 | Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever | Physics | 27 | Expired |
| US6218086A | Method of forming ultrasmall structures and apparatus therefor | Emerging Cross-Sectional Technologies | 24 | Expired |
| US6369400B2 | Magnetic scanning or positioning system with at least two degrees of freedom | Electricity | 22 | Expired |
| US4591540A | Method of transferring a pattern into a radiation-sensitive layer | Physics | 22 | Expired |
| US5103493A | Improved planar etched mirror facets | Electricity | 20 | Expired |
| US6291140A | Low-cost photoplastic cantilever | Emerging Cross-Sectional Technologies | 18 | Expired |
| US5739425A | Cantilever with integrated deflection sensor | Emerging Cross-Sectional Technologies | 16 | Expired |
| US6566653B1 | Investigation device and method | Emerging Cross-Sectional Technologies | 16 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.