Bonding method for semiconductor chips
US5740956A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Dec 12, 1995 |
| Grant date | Apr 21, 1998 |
| Priority date | — |
| Expiry date | Dec 12, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/01082
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
This invention is related to providing a bonding method for flip chips in which the circuit part is oriented to be face-down on a substrate after bonding bumps are formed on the semiconductor chip namely, forming Au bumps by Au wire ball bonding employing a wire ball bonding device onto aluminum bond pads of the semiconductor chips; coating the Au bumps with Sn/Pb alloy bumps also by wire ball bonding using a wire ball bonding device; with or without re-forming the Sn/Pb alloy bumps into a desired ball-shape by performing a heat treatment in a furnace after an activation solvent is applied to the Sn/Pb alloy bumps; and bonding (by the heat treatment in the furnace) the substrate to the coated bumps containing chip by a heat treatment in the furnace.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.