Patent · US Expired

Stable FET with shielding region in the substrate

US5742082A · kind A · utility

23Cited by
1References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 22, 1996
Grant dateApr 21, 1998
Priority date
Expiry dateNov 22, 2016

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/357

Abstract

A stable FET including a substrate structure with a doped layer formed as a portion of the substrate structure and defining an electrically conductive shielding region adjacent a surface of the substrate structure. A channel region is positioned on the shielding region and includes a plurality of epitaxial layers grown on the surface of the substrate structure in overlying relationship to the doped layer. A drain and a source are positioned on the channel region in spaced relationship from each other with a gate positioned in overlying relationship on the channel region between the drain and source. An externally accessible electrical contact is connected to the shielding region and to the source region to provide a path for the removal of internally generated charges, such as holes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.