Method and apparatus for evacuating vacuum system
US5746581A · kind A · utility
19Cited by
7References
18Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jun 6, 1995 |
| Grant date | May 5, 1998 |
| Priority date | — |
| Expiry date | Jun 6, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02B30/70
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A method and apparatus for evacuating a vacuum system which includes an evacuating portion comprising first and second vacuum pumps which are connected in series. The method and the apparatus are characterized in that the first vacuum pump is operated in a range from reverse rotation to forward rotation, and the second vacuum pump is rotated unidirectionally, thereby enabling pressure control of the vacuum system over a wide range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.