Wafer boat
US5752609A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 5, 1997 |
| Grant date | May 19, 1998 |
| Priority date | — |
| Expiry date | Feb 5, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67309
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer boat includes a plurality of rods arranged substantially parallel to each other at regular intervals. A plurality of ring members are attached to the rods at regular intervals in a longitudinal direction of the rods. A plurality of supporting pieces are attached to each of the ring members. Each of the supporting pieces extends upward from an upper surface portion of each of the ring members and is bent radially inward of the ring member. The supporting pieces of each of the ring members are brought into contact with an edge portions of a lower surface of the wafer to support the wafer. Further, a plurality of convex portions are formed at inner peripheral edge portions of each of the ring members between each pair of adjacent ones of the rods, and extend radially inward of the ring member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.