Apparatus and method for programming antifuse structures
US5753540A · kind A · utility
3Cited by
38References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 20, 1996 |
| Grant date | May 19, 1998 |
| Priority date | — |
| Expiry date | Aug 20, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3011
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disclosed is a method for programming an antifuse structure. The antifuse structure is programmed by applying an alternating current having alternating current pulses between a bottom and a top electrode to generate a conduction path through an antifuse material sandwiched between the electrodes. The conduction path is formed incrementally due to an electron flow produced as a result of each alternating current pulse thereby defining the conduction path at a substantially centered portion of the antifuse material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.