Patent · US Expired

Laser gas controller and charging/discharging device for discharge-excited laser

US5754579A · kind A · utility

45Cited by
1References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 13, 1996
Grant dateMay 19, 1998
Priority date
Expiry dateDec 13, 2016

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01S3/134
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A first object is to stabilize output of laser light. In order to achieve the first object, if it is detected by an output detection means (15) that the output (E) of laser light (La) has departed from a target value, whilst maintaining the voltage of a power source (17) at a fixed value or in a fixed range, the amount of laser gas supplied to a laser chamber (4) is controlled such that the output (E) of laser light becomes the target value. A second object is to reduce the wear of the pre-ionization electrodes and to prevent drop in output of laser light. The second object is achieved as follows. Specifically, the pulse current discharged from primary capacitor (C1) is stepped up in voltage by a pulse transformer and is charged onto a secondary capacitor (C2). At this point a magnetic switch (SR) that is connected to the downstream side of secondary capacitor (C2) becomes saturated and becomes conductive, allowing current to pass through pre-ionization electrodes (6) that are connected in series with the magnetic switch (SR). At the time-point where the movement of charge of secondary capacitor (C2) has finished, a discharge current in the reverse direction tries to flow in second…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.