Hakaru Mizoguchi
49Patents
12h-index
53Co-inventors
84Inventor score
Filing activity: Feb 16, 1984 → Aug 5, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5450436A | Laser gas replenishing apparatus and method in excimer laser system | Electricity | 89 | Expired |
| US5535233A | Laser device | Electricity | 72 | Expired |
| US5557629A | Laser device having an electrode with auxiliary conductor members | Electricity | 71 | Expired |
| US5642374A | Excimer laser device | Electricity | 71 | Expired |
| US5754579A | Laser gas controller and charging/discharging device for discharge-excited laser | Electricity | 45 | Expired |
| US6130904A | Gas supplementation method of excimer laser apparatus | Electricity | 29 | Expired |
| US5373523A | Excimer laser apparatus | Electricity | 28 | Expired |
| US6008497A | Laser appartus | Electricity | 22 | Expired |
| US6101211A | Narrow-band laser apparatus | Electricity | 21 | Expired |
| US6810061B2 | Discharge electrode and discharge electrode manufacturing method | Electricity | 16 | Expired |
| US7067832B2 | Extreme ultraviolet light source | Electricity | 16 | Expired |
| US8395133B2 | Apparatus and method of adjusting a laser light source for an EUV source device | Electricity | 15 | Active |
| US9072153B2 | Extreme ultraviolet light generation system utilizing a pre-pulse to create a diffused dome shaped target | Electricity | 12 | Active |
| US6839373B1 | Ultra-narrow band flourine laser apparatus | Electricity | 12 | Expired |
| US5291509A | Gas laser apparatus | Mechanical Engineering; Lighting; Heating | 11 | Expired |
| US4571730A | Cross flow type laser devices | Electricity | 10 | Expired |
| US6337872B1 | Once through fan for excimer laser apparatus | Electricity | 10 | Expired |
| US9265136B2 | System and method for generating extreme ultraviolet light | Electricity | 9 | Active |
| US4745614A | Silent discharge type laser device | Electricity | 8 | Expired |
| US8507883B2 | Extreme ultraviolet light source apparatus | Electricity | 7 | Active |
| US7078717B2 | Light source device and exposure equipment using the same | Electricity | 6 | Expired |
| US8212228B2 | Extreme ultra violet light source apparatus | Physics | 5 | Active |
| US8891161B2 | Optical device, laser apparatus, and extreme ultraviolet light generation system | Electricity | 4 | Active |
| US9402297B2 | Extreme ultraviolet light generation system | Electricity | 3 | Active |
| US6639929B2 | Pulse oscillating gas laser device | Electricity | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.