Substrate inspection apparatus and method
US5754678A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 30, 1996 |
| Grant date | May 19, 1998 |
| Priority date | — |
| Expiry date | May 30, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S345/904
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method for inspecting a substrate having a plurality of output pixels using an image sensing device having a plurality of input pixels includes the steps of capturing an input image of a plurality of groups of output pixels with a plurality of groups of input pixels, each group of input pixels capturing a group of output pixels, each input pixel in a group of input pixels having a position, inhibiting modulation contributions from input pixels in the input image, forming a plurality of images from the plurality of groups of input pixels in the input image, each image including input pixels from a similar position in each group of input pixels, detecting defects in each of the plurality of images, and determining defects in sub-pixels of the substrate in response to the defects detected in each of the plurality of images.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.