Two-dimensional beam deflector
US5764365A · kind A · utility
77Cited by
17References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 13, 1996 |
| Grant date | Jun 9, 1998 |
| Priority date | — |
| Expiry date | May 13, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/704
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A two dimensional beam deflector is disclosed which deflects beams from multiple optical assemblies. The input of beams of the multiple optical assemblies follow parallel optical paths until deflection to a wafer. An ellipsometer using a two-dimensional beam deflector is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.