Elimination of vibration by vibration coupling in microscopy applications
US5764409A · kind A · utility
Inventor
Key dates
| Filing date | Apr 26, 1996 |
| Grant date | Jun 9, 1998 |
| Priority date | — |
| Expiry date | Apr 26, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/64
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A portable emission microscope for analyzing failures in an integrated circuit chip while the chip is contained within a wafer sorter. A base for the microscope is placed over an opening in the wafer sorter. A translational apparatus is attached to the base for lowering a charge coupled device camera into an opening in the wafer sorter. A compact housing containing microscope optics is coupled to the camera. Also, a flexible rubber boot is coupled to the microscope optics for shielding extraneous light from entering the camera. A vibration reducing apparatus is coupled to the microscope optics for preventing movement of the camera relative to the chip. The vibration reducing apparatus fits within the rubber boot and is a rigid, hollow cylinder having an adjustable length. The microscope optics view the chip through the cylinder. The cylinder is adjusted such that when the camera is lowered into position over the chip, the microscope optics are an appropriate distance from the chip, the cylinder presses against, and firmly contacts, the surface surrounding the chip, preventing movement of the camera relative to the chip, while the rubber boot resiliently conforms to the surface surr…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.