Vibration damping apparatus
US5765800A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 2, 1996 |
| Grant date | Jun 16, 1998 |
| Priority date | — |
| Expiry date | Oct 2, 2016 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16F15/0232
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A vibration damping apparatus has a vibration-isolating table for placing an object thereon which is to be isolated from vibrations, an air spring mounted on an installation floor and supporting the vibration-isolating table for attenuating vibrations from the installation floor, an air pressure controller for controlling an air pressure of the air spring, a displacement sensor for detecting a relative displacement between the vibration-isolating table and the installation floor and supplying a signal indicative of the detected relative displacement to the air pressure controller, and a spring element acting between the vibration-isolating table and the installation floor for positioning the vibration-isolating table horizontally. An electromagnet is disposed between the vibration-isolating table and the installation floor for actively attenuating vibrations of the vibration-isolating table. The vibration damping apparatus is operated to position the vibration-isolating table horizontally by means of the spring elements, and vertically by means of the air spring.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.