Patent · US Expired

Device for surface coating or lacquering of substrates

US5766359A · kind A · utility

18Cited by

0References

16Claims

0Family size

Assignee

SINGULUS TECHNOLOGIES AG · DE

Inventors

Eggo Sichmann · Gelnhausen, DE
Reinhard Gerigk · Gelnhausen, DE

Key dates

Filing date	Feb 18, 1997
Grant date	Jun 16, 1998
Priority date	—
Expiry date	Feb 18, 2017

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB05C11/1042
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

An apparatus for surface coating or for lacquering a substrate, such as a disk-shaped substrate 2, which can be placed on a substrate carrier 14 and can be driven or given a rotating movement by means of a drive device, wherein the material or the lacquer fluid 5 to be applied is placed on the substrate 2 from a feed device 6. The fluid medium or the lacquer 4 released by the substrate support 14 is delivered at least to a first collecting reservoir 17 which is connected with at least one filter 28, from where the fluid is indirectly or directly conducted via a pump 29 to the first collecting reservoir 27, wherein an underpressure can be set between a first flow-off line 33 of the first collecting reservoir 27 and the pump 29.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.