Helicon plasma processing tool utilizing a ferromagnetic induction coil with an internal cooling channel
US5767628A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 20, 1995 |
| Grant date | Jun 16, 1998 |
| Priority date | — |
| Expiry date | Dec 20, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/321
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Disclosed is a plasma dry processing apparatus for producing a plasma with a resonance zone including a chamber for plasma processing at least one workpiece, the workpiece situated at a first end of the chamber; an induction coil at a second end of the chamber, spaced from the workpiece, for providing a radio frequency induced electromagnetic magnetic field to generate a helicon plasma within the chamber; a plurality of magnetic dipoles contained within the material of the induction coil, the magnetic dipoles having their fields directed towards the interior of, and producing a well-confined plasma within, the chamber, wherein the fields are adjacent to the second end of the chamber and keep the plasma spaced from the second end of the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.