Patent · US Expired

Optical pellicle adhesion system

US5769984A · kind A · utility

8Cited by
13References
26Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 10, 1997
Grant dateJun 23, 1998
Priority date
Expiry dateFeb 10, 2017

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/31544
  • WIPO fieldOther special machines
  • WIPO sectorMechanical engineering

Abstract

One aspect of the invention comprises a method of assembling an optical pellicle including a pellicle frame and a pellicle membrane in which adhesive is first applied to the pellicle frame, and then solvent in the adhesive is permitted to evaporate. Solvent is then applied to the adhesive on the pellicle frame, and the pellicle membrane is mounted onto the adhesive on the pellicle frame. Normally the step in which solvent is permitted to evaporate involves baking the frame with the adhesive thereon at an elevated temperature. Also, it is normal that as soon as the solvent is applied to the adhesive on the pellicle frame, once the adhesive feels tacky, the pellicle membrane is mounted in place. An additional step to this process involves generation of heat in the pellicle membrane and the adhesive after the membrane is mounted to the adhesive on the pellicle frame, to further bond the membrane to the frame.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.