MICRO LITHOGRAPHY INC.
13Patents
2Active
13Granted
32Portfolio score
Filing activity: Aug 19, 1983 → Aug 19, 2019
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4470508A | Dustfree packaging container and method | Emerging Cross-Sectional Technologies | 74 | Expired |
| US5453816A | Protective mask for pellicle | Physics | 19 | Expired |
| US5820950A | Optical pellicle and package | Physics | 17 | Expired |
| US6190743A | Photomask protection system | Physics | 17 | Expired |
| US5772817A | Optical pellicle mounting system | Emerging Cross-Sectional Technologies | 16 | Expired |
| US5576125A | Method for making an optical pellicle | Emerging Cross-Sectional Technologies | 14 | Expired |
| US6566021B2 | Fluoropolymer-coated photomasks for photolithography | Physics | 13 | Expired |
| US6594073B2 | Antistatic optical pellicle | Physics | 10 | Expired |
| US5769984A | Optical pellicle adhesion system | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6573980B2 | Removable optical pellicle | Physics | 8 | Expired |
| US6841317B2 | Vent for an optical pellicle system | Physics | 4 | Expired |
| US8968971B2 | Pellicles with reduced particulates | Physics | 4 | Active |
| US10771900B2 | Speaker diaphragm structure | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.