Patent · US Expired

Optical pellicle mounting system

US5772817A · kind A · utility

16Cited by
13References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 10, 1997
Grant dateJun 30, 1998
Priority date
Expiry dateFeb 10, 2017

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/31544
  • WIPO fieldOther special machines
  • WIPO sectorMechanical engineering

Abstract

One aspect of the invention comprises a method of assembling an optical pellicle including a pellicle frame and a pellicle membrane in which adhesive is first applied to the pellicle frame, and then solvent in the adhesive is permitted to evaporate. Normally the step in which solvent is permitted to evaporate involves baking the frame with the adhesive thereon at an elevated temperature. The pellicle membrane is then placed over the adhesive covered frame, and a laser is used to bond the membrane to the frame. An additional, optional step to this process involves application of the laser to the outer edge of the pellicle membrane after the membrane is mounted to the pellicle frame to trim off excess membrane.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.