Membrane device with recessed electrodes and method of making
US5774252A · kind A · utility
30Cited by
9References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 19, 1996 |
| Grant date | Jun 30, 1998 |
| Priority date | — |
| Expiry date | Apr 19, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A membrane device is provided in which a plurality of ridges (14) and recesses (16) are formed proximate to a substrate (12). Electrodes (18) are formed within the recesses (16). A spacer (20) supports a membrane (22). Application of a potential difference between the membrane (22) and the electrodes (18) allows for deflection of the membrane (22) toward the electrodes (18).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.