Electrostatic discharge protection device and its method of fabrication
US5777368A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 13, 1996 |
| Grant date | Jul 7, 1998 |
| Priority date | — |
| Expiry date | May 13, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D89/811
Abstract
An electrostatic discharge (ESD) protection device includes a drain region and a source region, each having a heavily-doped region and a lightly-doped region, wherein the junction depth of the lightly-doped region is deeper than that of the heavily doped region. Accordingly, the ESD current density will be decreased owing to the enlarged junction area during the ESD event. In addition, the heat dissipation can be spread over the enlarged junction area instead of being focused on the drain cylindrical edge. Moreover, low parasitic capacitance in the bond pad is achieved because the junction capacitance of the lightly-doped region is smaller than that of the heavily-doped region. Furthermore, conducting blocks are arranged between the lightly-doped regions and the source/drain electrodes, respectively, to prevent the metal melt filament from spiking the junction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.