Probe card cleaning apparatus, probe apparatus with the cleaning apparatus, and probe card cleaning method
US5778485A · kind A · utility
33Cited by
5References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 5, 1995 |
| Grant date | Jul 14, 1998 |
| Priority date | — |
| Expiry date | Dec 5, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R3/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cleaning apparatus for cleaning a probe card having a contact element to be brought into electrical contact with a pad of a circuit to be inspected, comprises a conductive brush to be brought into contact at least with the contact element to clean the probe card, and a gas blow mechanism for intermittently blowing gas to the brush. The conductive brush is vibrated by the gas blow, and a particle adhered from the probe card is removed by the vibrating brush and the gas jet.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.