Linewidth control apparatus and method
US5780316A · kind A · utility
2Cited by
6References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 19, 1997 |
| Grant date | Jul 14, 1998 |
| Priority date | — |
| Expiry date | Jun 19, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/34
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Linewidth control features having integral transistors are disclosed. Optical and electrical measurements of the linewidth control feature and its associated transistor may be correlated thereby providing a method of improving production processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.