Filter system for semiconductor furnace
US5782942A · kind A · utility
3Cited by
8References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 11, 1996 |
| Grant date | Jul 21, 1998 |
| Priority date | — |
| Expiry date | Jan 11, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/909
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An improved filter system, particularly for the furnaces of a semiconductor manufacturing plant, has a standby filter and a piping system for connecting it momentarily in parallel with a normally used filter of one of the furnaces. A system of valves permits the normal filter to be isolated from its furnace so that it can be allowed to cool and then removed and replaced. The filter system avoids the problem that a standby filter is otherwise required for each furnace or that the replacement can not be made at a convenient time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.