Inventor

Wen Wu

6Patents
5h-index
9Co-inventors
52Inventor score

Filing activity: Jan 11, 1996 → Feb 3, 2010

Most-cited inventions

PatentTitleAreaCited byStatus
US7727882B1 Compositionally graded titanium nitride film for diffusion barrier applications Electricity 38 Active
US7682966B1 Multistep method of depositing metal seed layers Electricity 26 Active
US5948169A Apparatus for preventing particle deposition in a capacitance diaphragm gauge Chemistry; Metallurgy 18 Expired
US8017523B1 Deposition of doped copper seed layers having improved reliability Electricity 18 Active
US8298936B1 Multistep method of depositing metal seed layers Electricity 16 Active
US5782942A Filter system for semiconductor furnace Emerging Cross-Sectional Technologies 3 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.